Cantilever based MEMS pressure sensor using different Piezoelectric Materials: A comparative study

  Ashish Kumar,  C. Periasamy,  B.D. Pant

The micro-electromechanical systems (MEMS) has attracted many researchers since past two decades especially in micro sensors and actuators. Pressure sensors are one of the important sensors among them. These pressure sensors have been based on various physical properties like piezoresistive, piezoelectric, capacitive, magnetic, and electro‐static. In this paper we have studied cantilever based MEMS pressure sensor using different Piezoelectric Materials for micro-cantilever. In this work we have chosen PZT, ZnS and BaTiO3 as Piezoelectric Materials. We designed, modeled and simulated our device in COMSOL software based on finite element method. The structure consists of silicon on piezoelectric micro-cantilever with cantilever beam. In simulation we have studied displacement and voltage by varying applied pressure. It is observed that the induced voltage is almost linear with the applied force. The comparative study by simulations can be used to provide the guidelines for a design and optimization of performance of the different piezoelectric micro-cantilever pressure sensors.

Keywords- Micro cantilever, MEMS, Piezoelectric, Pressure Sensor, Finite Element method.

Unique Identification Number - IJEDR1404103
Page Number(s) - 4022-4026
Pubished in - Volume 2 | Issue 4 | Dec 2014
DOI (Digital Object Identifier) -    Behind surya mandal ,Ward no-19
Publisher - IJEDR (ISSN - 2321-9939)

  Ashish Kumar,  C. Periasamy,  B.D. Pant,   "Cantilever based MEMS pressure sensor using different Piezoelectric Materials: A comparative study", International Journal of Engineering Development and Research (IJEDR), ISSN:2321-9939, Volume.2, Issue 4, pp.4022-4026, Dec 2014, Available at :http://www.ijedr.org/papers/IJEDR1404103.pdf